Fabrication of grating for GaN-based distributed feedback lasers using hot embossing nanoimprint lithography
碩士 === 國立臺灣科技大學 === 電子工程系 === 104 === Hot embossing nanoimprint lithography (NIL) manufacturing only required a previously made mold by using electron beam lithography, and use the mold to imprint repeatedly and quickly to produce nano-level structure. Therefore, it can reduce waste of time and the...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2016
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| Online Access: | http://ndltd.ncl.edu.tw/handle/73838325787774237050 |