Design of novel interference lithography systems
碩士 === 國立臺灣科技大學 === 光電工程研究所 === 104 === The periodic structure realized with conventional Lloyd’s Mirror interference lithography system has limitation on its period and exposure area due to the geometric structure. To overcome the problem, this thesis instigates the formation of long-period grating...
| Main Authors: | , |
|---|---|
| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2016
|
| Online Access: | http://ndltd.ncl.edu.tw/handle/t9h2y7 |