Development of Cross Beam-Membrane Structure for Silicon-On-Insultor Pressure sensor
碩士 === 國立臺灣大學 === 應用力學研究所 === 104 === Highly stable pressure sensors were developed in this study. The sensors were fabricated via bulk micromachining technology for micro-electromechanical systems. The sensors are designed with piezoresistors situated at the edges of the square diaphragm on a p-typ...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2016
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| Online Access: | http://ndltd.ncl.edu.tw/handle/19292894416529696447 |