Sensitivity Enhancement of Atomic-layer MoS2 Gas Sensor Through Oxygen Plasma Treatment
碩士 === 國立臺灣大學 === 電子工程學研究所 === 104 === A novel volatile organic compound (VOC) sensor with the MoS2 atomic-layers was developed in this research. Such sensor was made by transferring the MoS2 atomic-layers grown with the chemical vapor deposition (CVD) method onto the interdigitated electrode manufa...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2016
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| Online Access: | http://ndltd.ncl.edu.tw/handle/13342940310564336134 |