Applications of ZnO-In2O3 composite films in photodegradation and gas sensing devices
碩士 === 國立臺灣海洋大學 === 材料工程研究所 === 104 === ZnO-In2O3 composite thin films were grown by radio frequency cosputtering ZnO and In2O3 ceramic targets in this study. The indium content of the composite films was varied from 1.7 at% to 8.2 at% by varying In2O3 sputtering power during cosputtering thin-film...
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Other Authors: | |
Format: | Others |
Language: | zh-TW |
Published: |
2016
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Online Access: | http://ndltd.ncl.edu.tw/handle/40790308962615430223 |