| Summary: | 碩士 === 國立清華大學 === 奈米工程與微系統研究所 === 104 === Following the trend where many robots have begun replacing the nursing needs, in order to make the movement of robot hand more fluent in grasping and manipulation, there is a requirement that the tactile sensors in their hands should possess the ability to sense shear force. When a robot hand carries out its job, there is a different need of sensing sensitivity on each zone of hand depending on the quantity of force applied. Previous work usually regards size of the sensing structure as a parameter of designing the sensing sensitivity. However, if the design has to be modified, all of the photomasks in fabrication process may be redrawn or disposed. We will propose a new parameter as we make use of the size of the cavity surrounding the sensing structure, and aim to fabricate tactile sensors with different sensing sensitivity.
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