Fabrication of High Sensitivity and High Collecting Efficiency Backscattered Electron Detector
碩士 === 國立清華大學 === 工程與系統科學系 === 104 === The purpose of this research is to fabricate a high sensitivity and high collecting efficiency backscattered electron detector. The detector is set in the Scanning Electron Microscope. The detector can collect the backscattered electrons and produce the signals...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2016
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| Online Access: | http://ndltd.ncl.edu.tw/handle/35838844338447245702 |