Hetero-epitaxial growth Si1-xGex film via a low temperature aluminum-induced solid phase epitaxy (AI-SPE) process
博士 === 國立清華大學 === 工程與系統科學系 === 104 === Reducing the solar cell manufacture cost makes the concentrator photovoltaic (CPV) has more competitive in the market. One of the potential method is to use a single crystal silicon substrate (sc-Si) substituted germanium or gallium arsenide (GaAs) substrate. G...
Main Authors: | Lin, Chuan Jung, 林泉融 |
---|---|
Other Authors: | Chen, Fu Rong |
Format: | Others |
Language: | zh-TW |
Published: |
2016
|
Online Access: | http://ndltd.ncl.edu.tw/handle/93453236658056864632 |
Similar Items
-
The fabrication of Si1-xGex MOSFET
by: Ching-Chieh Shih, et al.
Published: (2003) -
In-line Si1-xGex epitaxial process monitoring and diagnostics using multiwavelength high resolution micro-Raman spectroscopy
by: Chun-Wei Chang, et al.
Published: (2012-06-01) -
Ion implantation in epitaxial GexSi1-x on Si(100)
by: Lie, Yu-Chun Donald
Published: (1996) -
Study of interfacial reactions of metals on Si1-xGex and Si1-x-yGexCy films
by: Jian-Shing Luo, et al.
Published: (2000) -
Characterization of Si and Sil-xGex epilayers grown by RTCBE
by: WANG,ZHENG-TANG, et al.
Published: (1991)