A Study on Grinding Sapphire with Two-Dimensional Ultrasonic Assisted
碩士 === 國立清華大學 === 動力機械工程學系 === 104 === Sapphire (single-crystal Al2O3) is highly used in LED, semiconductor, optical and communication industries, because of its high hardness, great optical transparency and chemical stability. In engineering applications, sapphire is always required to be thinning...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2016
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| Online Access: | http://ndltd.ncl.edu.tw/handle/69783796864852037370 |