Constructing a Virtual Metrology Framework for Halftone thickness based on Partial Least Squares and an Empirical Study
碩士 === 國立清華大學 === 工業工程與工程管理學系 === 104 === In a highly competitive and capital-intensive industry, such as panel industry. To keep its competitive advantage, panel industry try to use the halftone mask into the process. Using halftone mask reduce the process flow into four. However, halftone mask eas...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2016
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| Online Access: | http://ndltd.ncl.edu.tw/handle/60454192367212341929 |