Phase change and coalescence behavior of the particles during pulsed laser ablation of Si3N4 in vacuum and TEOS
碩士 === 國立中山大學 === 材料與光電科學學系研究所 === 104 === This research deals with phase change and coalescence behavior of the particles produced by pulsed laser ablation (PLA) of Si3N4 (α>>β) polycrystal in vacuum and tetraethyl orthosilicate (TEOS) for X-ray diffraction, electron microscopy and optical sp...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2016
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| Online Access: | http://ndltd.ncl.edu.tw/handle/32913538323631147281 |