A Study on the Characteristics of Ni-Cr-Mn-Y-X (X = Nb, Dy, Cu, Tb) Thin Film Resistors
碩士 === 國立屏東科技大學 === 機械工程系所 === 104 === In this experiment is prepared quinary alloy Ni-Cr-Mn-Y-Nb、Ni-Cr-Mn-Y-Dy、Ni-Cr-Mn-Y-Cu、Ni-Cr-Mn-Y-Tb thin films on glass and Al2O3 substrates by DC and RF magnetron co-sputtering. The influence of composition, phase structures, microstructures and electrical pr...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2016
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| Online Access: | http://ndltd.ncl.edu.tw/handle/37550103978049945174 |