A study of formation of TiO2 thin film doped with X element using thermal oxidation (X = W, Mn, Nb)
碩士 === 國立屏東科技大學 === 材料工程研究所 === 104 === In this study, TiO2, W-TiO2, Mn-TiO2 and Nb-TiO2 thin films were deposited by RF and DC magnetron co-sputtering, which were formed using thermal oxidation. The effects of the constitution, annealing temperature and phase structure on the characteristics of TiO...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2016
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| Online Access: | http://ndltd.ncl.edu.tw/handle/38339952928557554254 |