The Study of Multiple Indium Nitride Field Effect Humidity Sensor
碩士 === 國立高雄海洋科技大學 === 微電子工程研究所 === 104 === This study is the use of a DC sputtering system in the growth of indium nitride porous aluminum substrate having a sensing layer of the humidity sensor, indium nitride humidity sensing element having two ends and rectification of the three-terminal impedanc...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2016
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| Online Access: | http://ndltd.ncl.edu.tw/handle/51134055027821806012 |