MgZnO/ZnO高電子移動率電晶體
碩士 === 國立嘉義大學 === 電子物理學系光電暨固態電子研究所 === 104 === In this experiment, the ZnO and MgZnO layers were deposited on sapphire substrate to form two-dimensional electron gas (2DEG) structure. Also the metal-semiconductor (M-S) and metal-oxide-semiconductor (MOS) field-effect transistor (FET) were fabric...
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Format: | Others |
Language: | zh-TW |
Online Access: | http://ndltd.ncl.edu.tw/handle/61597577757685398433 |