Fabrication and application of plasma polymerization films
碩士 === 國立中央大學 === 照明與顯示科技研究所 === 104 === Plasma polymerization use plasma to fragment monomer. Plasma polymer thin films are well known for their excellent properties such as heat resistant, insulation, chemical inertness and pinhole-free. In the study, SiOxCy thin films were deposited by plasma pol...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2016
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| Online Access: | http://ndltd.ncl.edu.tw/handle/47293231349311746886 |