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碩士 === 國立中央大學 === 化學工程與材料工程學系 === 104 === In this study, we demonstrated that large-area arrays of vertically-aligned single crystalline silicon nanowire were successfully fabricated on (100)Si substrates by using the polystyrene nanosphere lithography combined with the Au-assisted chemical etchin...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2016
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| Online Access: | http://ndltd.ncl.edu.tw/handle/30333903809073069046 |