Robust Control for Vacuum System with Time Delay
碩士 === 國立交通大學 === 機械工程系所 === 104 === Pressure control of vacuum system is the most crucial thing for the quality of semiconductor process. Take MOCVD (Metal Organic Chemical Vapor Decomposition) for example. The chamber pressure of MOCVD is controlled by PID, which is limited to fix the problem like...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2016
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| Online Access: | http://ndltd.ncl.edu.tw/handle/50896201223374507507 |