Comparison on Microwave and Furnace Annealing for p-type SnOx Thin-Film Transistors in Oxygen Ambient

碩士 === 國立交通大學 === 電子工程學系 電子研究所 === 104 === In the recent years, thin-film transistors (TFTs) using oxide semiconductor have been attracted attention due to their merits in performance and low-temperature process, thus these materials have been regarded as a promising next-generation TFT technol...

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Bibliographic Details
Main Authors: Chang, Shih-Ho, 張世和
Other Authors: Chang, Kow-Ming
Format: Others
Language:en_US
Published: 2016
Online Access:http://ndltd.ncl.edu.tw/handle/4kmgzy