Fabrication of Metal-Oxide Thin-Film Transistors and Inverters with “Film Profile Engineering”
博士 === 國立交通大學 === 電子工程學系 電子研究所 === 104 === A new “film profile engineering” (FPE) scheme is conceived and established to fabricate sub-micron, high-performance metal-oxide thin film transistors (MO TFTs) and logic gates. In the scheme, a bridge is first constructed to suspend right over the gate ele...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | en_US |
| Published: |
2016
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| Online Access: | http://ndltd.ncl.edu.tw/handle/3kkm33 |