SiC Backside Via Process for GaN RF Power Device Application

碩士 === 國立交通大學 === 照明與能源光電研究所 === 104 === As a promising material, GaN attracts a lot of research attentions in semiconductor industry. Its excellent properties, such as wide bandgap, high electron mobility, high saturation velocity and high maximum operating temperature make it the most attractive m...

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Bibliographic Details
Main Authors: Chiu, Yi-Ju, 邱奕儒
Other Authors: Chang, Edward-Yi
Format: Others
Language:en_US
Published: 2015
Online Access:http://ndltd.ncl.edu.tw/handle/3ca43s