Epitaxial growth of nonpolar m-plane and semipolar (1013) ZnO films on m-plane sapphire substrate by mist chemical vapor deposition

碩士 === 國立交通大學 === 材料科學與工程學系所 === 104

Bibliographic Details
Main Authors: Yang, Tzu-I, 楊子毅
Other Authors: Chang, Li
Format: Others
Language:zh-TW
Published: 2016
Online Access:http://ndltd.ncl.edu.tw/handle/11088706351218059826