The Study of InGaZnO Thin Film Transistors with Dual Treatment of Pre-oxidation ZrO2 High-ĸ Dielectric and Post-oxidation InGaZnO Channel by Neutral Beam System
碩士 === 國立交通大學 === 工學院加速器光源科技與應用碩士學位學程 === 104 === Amorphous InGaZnO (a-IGZO) Thin Film Transistor (TFTs) has been studied extensively for their perspective applications in next generation active-matrix displays such as liquid crystal displays and flat-panel displays, due to its better field-effect m...
| Main Authors: | , |
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| Format: | Others |
| Language: | en_US |
| Published: |
2016
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| Online Access: | http://ndltd.ncl.edu.tw/handle/wyh9jx |