Graphene Synthesis by Copper Thin Film and the Study on Electrical and Diffusion Barrier Properties in Graphene-Coated Copper Nanowires for Interconnects
碩士 === 國立成功大學 === 機械工程學系 === 104 === Copper nanowires are made by bi-layer liftoff process using e-beam lithography and e-beam evaporation. Graphene-coated copper nanowires are synthesized by the rapid thermal process with 900℃ growth temperature for 3 minute and control cooling rate until 750℃ ....
| Main Authors: | , |
|---|---|
| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2016
|
| Online Access: | http://ndltd.ncl.edu.tw/handle/85906280814906208761 |