The Superstructure of BN on Si(111) Surface

碩士 === 國立成功大學 === 物理學系 === 104 === In this study, we use the Si(111)-heavy boron doping wafer to be the growth substrate. The doped boron atoms of the wafer and the ammonia (NH3) molecules are the sources to grow h-BN on Si substrate with high uniformity and wafer scale. The low-energy electron diff...

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Bibliographic Details
Main Authors: Kai-ChengZeng, 曾凱晟
Other Authors: Chung-Lin Wu
Format: Others
Language:zh-TW
Published: 2016
Online Access:http://ndltd.ncl.edu.tw/handle/30657426297279153340