Growth and Characterization of (AlxGa1-x)2O3 Films by Pulsed Laser Deposition
碩士 === 國立中興大學 === 材料科學與工程學系所 === 104 === Recently, to fabricate the deep ultraviolet photodetectors, the use of materials with the shorter cut-off wavelength and the higher transmittance is required. Therefore, the wide-bandgap (AlGa)2O3 (AGO) thin films are worth developing. In this research, the w...
Main Authors: | , |
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Other Authors: | |
Format: | Others |
Language: | zh-TW |
Published: |
2016
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Online Access: | http://ndltd.ncl.edu.tw/handle/49093494455856469989 |