Growth and Characterization of (AlxGa1-x)2O3 Films by Pulsed Laser Deposition

碩士 === 國立中興大學 === 材料科學與工程學系所 === 104 === Recently, to fabricate the deep ultraviolet photodetectors, the use of materials with the shorter cut-off wavelength and the higher transmittance is required. Therefore, the wide-bandgap (AlGa)2O3 (AGO) thin films are worth developing. In this research, the w...

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Bibliographic Details
Main Authors: Shih-Yin Wang, 王詩茵
Other Authors: Dong-Sing Wuu
Format: Others
Language:zh-TW
Published: 2016
Online Access:http://ndltd.ncl.edu.tw/handle/49093494455856469989