Effect of an OES feedback control on the properties of nc-TiC/a-C:H coated by high power impulse magnetron sputtering
碩士 === 明道大學 === 材料與能源工程學系碩士班 === 104 === An optical emission spectrometer (OES) feedback-controlled high power impulse magnetron sputter deposition system was used to deposit nc-TiC/a-C:H thin films in a reactive mode. The plasma emission intensity of Ti2+ ions at the emission wavelength of 365...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2016
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| Online Access: | http://ndltd.ncl.edu.tw/handle/73575470850286561707 |