Design and Develop for the Quartz parts of the Polishing Technology
碩士 === 嶺東科技大學 === 創意產品設計系碩士班 === 104 === Abstract This study focused on the industry's chemical mechanical polishing (Chemical Mechanical Polishing, CMP) process used by the soft polishing pad, a hot melt adhesive material spraying equipment designed to replace the soft polishing pad, and with...
| Main Authors: | , |
|---|---|
| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2015
|
| Online Access: | http://ndltd.ncl.edu.tw/handle/46200236503099627886 |