Study of Magnesium Oxide as Insulating Dielectric Thin Film by RF Magnetron Sputter
碩士 === 龍華科技大學 === 電子工程系碩士班 === 104 === MgO thin films were deposited using MgO ceramic target by RF magnetron sputter. The effects of both deposition pressure and annealing temperature on MgO dielectric property have been evaluated. MgO films were deposited pressure at 2 pa, 4 pa, 13 pa and 15 pa an...
| Main Authors: | , |
|---|---|
| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2016
|
| Online Access: | http://ndltd.ncl.edu.tw/handle/82607028834686025214 |