Study of Surface Passivation on Aluminum Nitride Substrate Prepared by Hot-Wire Chemical Vapor Deposition and Discuss on Microwave Properties
碩士 === 崑山科技大學 === 電腦與通訊研究所 === 105
Main Authors: | , |
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Other Authors: | |
Format: | Others |
Language: | en_US |
Published: |
2017
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Online Access: | http://ndltd.ncl.edu.tw/handle/8a86vx |