Root Cause Identification on the Breakage of PP Pipe in the Outlet of Local Scrubber for the Gas Treatment in Fluorine-Containing Process Tool

碩士 === 崑山科技大學 === 環境工程研究所 === 104 === Root cause identification on the breakage of PP pipe in the outlet of local scrubber for the gas treatment in fluorine-containing process Tool could be carried out by integrating the process behavior, analyzing the gas species in the outlet of the local scrubber...

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Main Authors: Chia-Chih Hung, 洪家志
Other Authors: Kuen-Chyr Lee
Format: Others
Language:zh-TW
Published: 2016
Online Access:http://ndltd.ncl.edu.tw/handle/46133131827376446571
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spelling ndltd-TW-104KSUT05150052017-01-01T04:05:32Z http://ndltd.ncl.edu.tw/handle/46133131827376446571 Root Cause Identification on the Breakage of PP Pipe in the Outlet of Local Scrubber for the Gas Treatment in Fluorine-Containing Process Tool 含氟製程機台局部廢氣處理設備出口管路破裂意外事故探討 Chia-Chih Hung 洪家志 碩士 崑山科技大學 環境工程研究所 104 Root cause identification on the breakage of PP pipe in the outlet of local scrubber for the gas treatment in fluorine-containing process Tool could be carried out by integrating the process behavior, analyzing the gas species in the outlet of the local scrubber by RGA and comparing the different type of local scrubber. That will be good to find out the root cause of breakage on PP pipe. Kuen-Chyr Lee 李崑池 2016 學位論文 ; thesis 20 zh-TW
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description 碩士 === 崑山科技大學 === 環境工程研究所 === 104 === Root cause identification on the breakage of PP pipe in the outlet of local scrubber for the gas treatment in fluorine-containing process Tool could be carried out by integrating the process behavior, analyzing the gas species in the outlet of the local scrubber by RGA and comparing the different type of local scrubber. That will be good to find out the root cause of breakage on PP pipe.
author2 Kuen-Chyr Lee
author_facet Kuen-Chyr Lee
Chia-Chih Hung
洪家志
author Chia-Chih Hung
洪家志
spellingShingle Chia-Chih Hung
洪家志
Root Cause Identification on the Breakage of PP Pipe in the Outlet of Local Scrubber for the Gas Treatment in Fluorine-Containing Process Tool
author_sort Chia-Chih Hung
title Root Cause Identification on the Breakage of PP Pipe in the Outlet of Local Scrubber for the Gas Treatment in Fluorine-Containing Process Tool
title_short Root Cause Identification on the Breakage of PP Pipe in the Outlet of Local Scrubber for the Gas Treatment in Fluorine-Containing Process Tool
title_full Root Cause Identification on the Breakage of PP Pipe in the Outlet of Local Scrubber for the Gas Treatment in Fluorine-Containing Process Tool
title_fullStr Root Cause Identification on the Breakage of PP Pipe in the Outlet of Local Scrubber for the Gas Treatment in Fluorine-Containing Process Tool
title_full_unstemmed Root Cause Identification on the Breakage of PP Pipe in the Outlet of Local Scrubber for the Gas Treatment in Fluorine-Containing Process Tool
title_sort root cause identification on the breakage of pp pipe in the outlet of local scrubber for the gas treatment in fluorine-containing process tool
publishDate 2016
url http://ndltd.ncl.edu.tw/handle/46133131827376446571
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