Root Cause Identification on the Breakage of PP Pipe in the Outlet of Local Scrubber for the Gas Treatment in Fluorine-Containing Process Tool
碩士 === 崑山科技大學 === 環境工程研究所 === 104 === Root cause identification on the breakage of PP pipe in the outlet of local scrubber for the gas treatment in fluorine-containing process Tool could be carried out by integrating the process behavior, analyzing the gas species in the outlet of the local scrubber...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2016
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| Online Access: | http://ndltd.ncl.edu.tw/handle/46133131827376446571 |