A study of WO3 thin film based hydrogen sensor
碩士 === 崑山科技大學 === 光電工程研究所 === 104 === In this study,thermal evaporation method to grow tungsten trioxide on P-type silicon substrate are investigated.The films are treated by changing thermal annealing temperature in vacuum to obtain different structures.The porous structure of the silicon substrate...
Main Authors: | SYU,GUO-HAO, 許國浩 |
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Other Authors: | CHANG,PING-CHUAN |
Format: | Others |
Language: | zh-TW |
Published: |
2016
|
Online Access: | http://ndltd.ncl.edu.tw/handle/5ur5bz |
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