A study of WO3 thin film based hydrogen sensor
碩士 === 崑山科技大學 === 光電工程研究所 === 104 === In this study,thermal evaporation method to grow tungsten trioxide on P-type silicon substrate are investigated.The films are treated by changing thermal annealing temperature in vacuum to obtain different structures.The porous structure of the silicon substrate...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2016
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| Online Access: | http://ndltd.ncl.edu.tw/handle/5ur5bz |