Measurement of Surface Contour and Residual Stress in Thin Films by a Mach-Zehnder Interferometer
碩士 === 逢甲大學 === 電機工程學系 === 104 === This study presents the measurement of surface contour and thin film stress by a Mach-Zehnder interferometer and fast Fourier transform (FFT) method. Mach-Zehnder interferometer is a transmission type interferometer to obtain the interferograms by changing the leng...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2016
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| Online Access: | http://ndltd.ncl.edu.tw/handle/30963871105489764680 |