Development of a Uniform High Density VHF Plasma Source

Development of a Uniform High Density VHF Plasma Source

博士 === 逢甲大學 === 材料科學與工程學系 === 104 === 專利申請中，暫不公開

Bibliographic Details
Main Authors: Cheng-Yang Lien, 連承暘
Other Authors: Chia-Fu Chen
Format: Others
Language:en_US
Published: 2016
Online Access:http://ndltd.ncl.edu.tw/handle/t7a882

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