Development of a Uniform High Density VHF Plasma Source
博士 === 逢甲大學 === 材料科學與工程學系 === 104 === 專利申請中，暫不公開
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | en_US |
| Published: |
2016
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| Online Access: | http://ndltd.ncl.edu.tw/handle/t7a882 |