Model Building, Dynamic Simulation and Optimal Design of a Planetary MOCVD process
碩士 === 逢甲大學 === 化學工程學系 === 104 === This thesis considers the mathematical modeling, dynamic simulation and optimal design of a planetary metal-organic chemical vapor deposition (MOCVD) reactor for GaAs film growth. A detailed 3D model of the planetary MOCVD reactor is developed, which includes a rea...
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| Format: | Others |
| Language: | zh-TW |
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2016
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| Online Access: | http://ndltd.ncl.edu.tw/handle/77214469729151445157 |