A Study of Particles and Defects from Semiconductor Discussion Furnace Process
碩士 === 逢甲大學 === 工業工程與系統管理學系 === 104 === Semiconductor Manufacturing technology-16 nanometer has been got into mass production in Taiwan’s semiconductor industry manufacturing process, and the yield has been higher than 90%. 10 nm technology has already started trial production. The research and deve...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2016
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| Online Access: | http://ndltd.ncl.edu.tw/handle/85558166238194397194 |