Using Quality Control Diagram for Semiconductor Machine Data Correction and Analysis

碩士 === 朝陽科技大學 === 資訊管理系 === 104 === IC wafer in semiconductor manufacturing processes, quality improvement and upgrading quality have become the main indicator of the semiconductor factory profit. The advance technologies are important but scanning electron microscopy workstation (SEM) is still as t...

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Bibliographic Details
Main Authors: CHANG, PEI-CHI, 張蓓琪
Other Authors: Chen, Rung-Ching
Format: Others
Language:zh-TW
Published: 2016
Online Access:http://ndltd.ncl.edu.tw/handle/43798588526843843074