The study of SnO2 based EIS sensors combined with CF4 plasma treatment for bio-sensing applications
碩士 === 長庚大學 === 電子工程學系 === 104 === In this thesis, we used RF sputtered tin oxide as the sensing membrane for bio-chemical sensing applications. We studied the effect of rapid thermal annealing (RTA) in oxygen ambient at different temperatures from 500oC to 800oC. SnO2 EIS devices annealing at 600 o...
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Format: | Others |
Language: | en_US |
Published: |
2016
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Online Access: | http://ndltd.ncl.edu.tw/handle/jvns3z |