The study of SnO2 based EIS sensors combined with CF4 plasma treatment for bio-sensing applications

碩士 === 長庚大學 === 電子工程學系 === 104 === In this thesis, we used RF sputtered tin oxide as the sensing membrane for bio-chemical sensing applications. We studied the effect of rapid thermal annealing (RTA) in oxygen ambient at different temperatures from 500oC to 800oC. SnO2 EIS devices annealing at 600 o...

Full description

Bibliographic Details
Main Author: Rama Krushna Mahanty
Other Authors: C. H. Kao
Format: Others
Language:en_US
Published: 2016
Online Access:http://ndltd.ncl.edu.tw/handle/jvns3z