Growth of High-Quality Germanium Thin Film with Low Threading Dislocation Density by Using PLD and Its Application to Fabrication of PIN Photodetectors
碩士 === 國立中正大學 === 物理系研究所 === 104 === In this experiment, we use pulsed laser deposition (PLD) system which has not been used to grow germanium (Ge) epitaxial thin film. And we reduce particulates of droplet like that appear on surface of samples by inject a trace of argon and use pol-ished targets....
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2016
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| Online Access: | http://ndltd.ncl.edu.tw/handle/05048382705367029653 |