Fabrication of Mo doped ITO transparent conductive films by DCmagnetron sputtering
碩士 === 元智大學 === 光電工程學系 === 103 === In this experiment produced under DC magnetron sputtering of indium tin oxide (ITO) doped with molybdenum of the film, wherein the Sn is 0.5wt.%, molybdenum 0.25wt.% (ITO: Mo , ITO: Mo). And thin films produced of indium tin oxide doped with molybdenum target, at a...
Main Authors: | , |
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Other Authors: | |
Format: | Others |
Language: | zh-TW |
Online Access: | http://ndltd.ncl.edu.tw/handle/47295413910537398394 |