The study of mask assisted laser micromachining

• Main Authors: You-hua Luo, 駱佑樺
• Other Authors: Chao-ching Ho
• Format: Others
• Language: zh-TW
• Published: 2014
• Online Access: http://ndltd.ncl.edu.tw/handle/66167194131389139785

碩士 === 國立雲林科技大學 === 機械工程系 === 103 === In this study, a mask assisted laser micromachining was proposed. The mask was placed upside the workpiece, and a laser beam passed through the opening hole inside the mask. Part of the plasma debris would splash on the mask through the induced shock wave when laser was striking the workpiece. Other parts of the plasma debris passed through the mask directly. The plasma debris sputtered around the top of the mask surface and avoided the plasma debris to be deposited around the drilled hole inlet. Two different camera configurations (i.e., coaxial setup and radial setup) were designed to capture the image of the plasma. By analyzing the image, the area and height of the plasma were measured at three different laser radiation energy. The hole size of mask was determined by correlated the area and height of the plasma image. The processing efficiency of the laser drilling was increased to 28% and the debris height was decreased to 51% when the mask was employed to assist laser micromachining. Furthermore, laser drilling efficiency was increased to 42% by decreasing the gap distance between mask and workpiece surface at the forth laser pulse.