The study of mask assisted laser micromachining

碩士 === 國立雲林科技大學 === 機械工程系 === 103 === In this study, a mask assisted laser micromachining was proposed. The mask was placed upside the workpiece, and a laser beam passed through the opening hole inside the mask. Part of the plasma debris would splash on the mask through the induced shock wave when l...

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Bibliographic Details
Main Authors: You-hua Luo, 駱佑樺
Other Authors: Chao-ching Ho
Format: Others
Language:zh-TW
Published: 2014
Online Access:http://ndltd.ncl.edu.tw/handle/66167194131389139785