The study of mask assisted laser micromachining
碩士 === 國立雲林科技大學 === 機械工程系 === 103 === In this study, a mask assisted laser micromachining was proposed. The mask was placed upside the workpiece, and a laser beam passed through the opening hole inside the mask. Part of the plasma debris would splash on the mask through the induced shock wave when l...
Main Authors: | , |
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Other Authors: | |
Format: | Others |
Language: | zh-TW |
Published: |
2014
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Online Access: | http://ndltd.ncl.edu.tw/handle/66167194131389139785 |