The Study of Fabrication of Hydrogenated P-I-N Solar Cell by RF Magnetron Sputtering
碩士 === 國立雲林科技大學 === 電子工程系 === 103 === In this study a (100) n-type single crystalline with 1-10 Ω-cm wafer was used as substrate. The amorphous silicon (a-Si) i-layer and p-layer were deposited on the substrate by the RF magnetron sputtering system in sequence. The post hydrogen plasma treatment was...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2015
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| Online Access: | http://ndltd.ncl.edu.tw/handle/17717677668751300210 |