Effect of reaction gas on the growth behavior of diamond films synthesized by hot-filament CVD process
碩士 === 淡江大學 === 物理學系碩士班 === 103 === Diamond films are high thermal conductivity and high tribological characteristics. They have great potential for industrial applications. The capability for growing diamond d films in large area is an important research issue. The granular structure of diamond...
Main Authors: | , |
---|---|
Other Authors: | |
Format: | Others |
Language: | zh-TW |
Published: |
2015
|
Online Access: | http://ndltd.ncl.edu.tw/handle/42416034228662442936 |