The study on 3D visualization and prediction of surface morphology for nanostructure fabrication by nano-oxidation technology

碩士 === 國立臺北科技大學 === 機電整合研究所 === 103 === The study is based on Atomic Force Microscopy (AFM) as the main instrument. Use DLC (Diamond Like Carbon) film specimen visualization technique of nano-oxidation. This research can be divided into two stages, first DLC film specimen of the oxide cytometry expe...

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Bibliographic Details
Main Authors: Yong- Chin You, 游永欽
Other Authors: Jen-Ching Huang
Language:zh-TW
Published: 2015
Online Access:http://ndltd.ncl.edu.tw/handle/tgvzc9