The characteristics of diamond-like carbon film by magnetron sputtering and spin coating
碩士 === 國立臺北科技大學 === 製造科技研究所 === 103 === This study deposits a suspension of nano-diamond particles (NDPs) onto D263T optical glass substrate by two methods.One is spin coating,the other is RF magnetron sputtering. The experimental results clearly show that the morphology and roughness of the surface...
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| Language: | zh-TW |
| Published: |
2015
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| Online Access: | http://ndltd.ncl.edu.tw/handle/e8rm32 |
| Summary: | 碩士 === 國立臺北科技大學 === 製造科技研究所 === 103 === This study deposits a suspension of nano-diamond particles (NDPs) onto D263T optical glass substrate by two methods.One is spin coating,the other is RF magnetron sputtering. The experimental results clearly show that the morphology and roughness of the surfaces of all as-deposited films are improved dramatically. Compared to non-coated surface, the surface roughness decrease from 1.553 nm to 0.176 nm and the contact angle increases from 48o to 70o by spin coating. On the other hand, the surface roughness decrease to 0.166 nm and the contact angle increases from 70o to 85o by RF magnetron sputtering.This means that the hydrophobic of all as-deposited films improves significantly due to success of diamond characteristics coated on the surface of the substrates. The transmittance of all as-deposited films is in the range from 91 % to 93 % by spin coating,and 20 % to 90% by RF magnetron sputtering.The results confirm that the thickness of film increases as the transmittance decreases
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