The characteristics of diamond-like carbon film by magnetron sputtering and spin coating

碩士 === 國立臺北科技大學 === 製造科技研究所 === 103 === This study deposits a suspension of nano-diamond particles (NDPs) onto D263T optical glass substrate by two methods.One is spin coating,the other is RF magnetron sputtering. The experimental results clearly show that the morphology and roughness of the surface...

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Bibliographic Details
Main Authors: Yo-Shin Lai, 賴又新
Other Authors: Chang Ho
Language:zh-TW
Published: 2015
Online Access:http://ndltd.ncl.edu.tw/handle/e8rm32